Title :
Compliant universal (CU) semiconductor substrates for III-V and Si Optoelectronics
Author :
Ejeckam, F.E. ; Seaford, M. ; Zhu, Z.H. ; Lo, Y.H. ; Hou, H.Q. ; Hammons, B.E.
Author_Institution :
School of Electrical Engineeritrg, Cornell University
Keywords :
Atomic layer deposition; Capacitive sensors; Fasteners; Gallium arsenide; III-V semiconductor materials; Lattices; Semiconductor device modeling; Substrates; Transistors; Wafer bonding;
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4125-2
DOI :
10.1109/CLEO.1997.602316
