• DocumentCode
    3355740
  • Title

    Compliant universal (CU) semiconductor substrates for III-V and Si Optoelectronics

  • Author

    Ejeckam, F.E. ; Seaford, M. ; Zhu, Z.H. ; Lo, Y.H. ; Hou, H.Q. ; Hammons, B.E.

  • Author_Institution
    School of Electrical Engineeritrg, Cornell University
  • Volume
    11
  • fYear
    1997
  • fDate
    18-23 May 1997
  • Firstpage
    109
  • Lastpage
    110
  • Keywords
    Atomic layer deposition; Capacitive sensors; Fasteners; Gallium arsenide; III-V semiconductor materials; Lattices; Semiconductor device modeling; Substrates; Transistors; Wafer bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    0-7803-4125-2
  • Type

    conf

  • DOI
    10.1109/CLEO.1997.602316
  • Filename
    602316
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3355740