Accurate laser interferometer system for displacement measurements with 1 pm resolution

Author

Dubrov, M.N. ; Medvedev, P.V.

Author_Institution

Inst. of Radio-Eng. & Electron., Russian Acad. of Sci., Fryazino

fYear

2008

fDate

Sept. 29 2008-Oct. 4 2008

Firstpage

165

Lastpage

167

Abstract

The laser interferometer technique with noise level up to 10^-12 m is described. It is based on a precise interference fringe measuring servo-system with wide range displacement linearity. The r.m.s. deviation of displacement-to-voltage transform factor is below 1% in the range of plusmn10⁵ periods of the interference pattern shifts. The dynamic range of available displacement amplitude is near of 210 dB. The system characteristics have been accurately tested and investigated. The examples of precise interferometer applications to geophysics and technological measurements are shown.

Keywords

displacement measurement; light interferometers; servomechanisms; displacement measurements; geophysics measurements; interference fringe; interference pattern shifts; laser interferometer system; r.m.s. deviation; servo-system; Displacement measurement; Dynamic range; Frequency; Geophysical measurements; Gratings; Interference; Linearity; Mirrors; Optical interferometry; Phase shifting interferometry; interferometer; laser; precision; strainmeter;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Optoelectronics and Lasers, 2008. CAOL 2008. 4th International Conference on

Conference_Location

Crimea

Print_ISBN

978-1-4244-1973-9

Electronic_ISBN

978-1-4244-1974-6

Type

conf

DOI

10.1109/CAOL.2008.4671874

Filename

4671874