Title :
Accurate laser interferometer system for displacement measurements with 1 pm resolution
Author :
Dubrov, M.N. ; Medvedev, P.V.
Author_Institution :
Inst. of Radio-Eng. & Electron., Russian Acad. of Sci., Fryazino
fDate :
Sept. 29 2008-Oct. 4 2008
Abstract :
The laser interferometer technique with noise level up to 10-12 m is described. It is based on a precise interference fringe measuring servo-system with wide range displacement linearity. The r.m.s. deviation of displacement-to-voltage transform factor is below 1% in the range of plusmn105 periods of the interference pattern shifts. The dynamic range of available displacement amplitude is near of 210 dB. The system characteristics have been accurately tested and investigated. The examples of precise interferometer applications to geophysics and technological measurements are shown.
Keywords :
displacement measurement; light interferometers; servomechanisms; displacement measurements; geophysics measurements; interference fringe; interference pattern shifts; laser interferometer system; r.m.s. deviation; servo-system; Displacement measurement; Dynamic range; Frequency; Geophysical measurements; Gratings; Interference; Linearity; Mirrors; Optical interferometry; Phase shifting interferometry; interferometer; laser; precision; strainmeter;
Conference_Titel :
Advanced Optoelectronics and Lasers, 2008. CAOL 2008. 4th International Conference on
Conference_Location :
Crimea
Print_ISBN :
978-1-4244-1973-9
Electronic_ISBN :
978-1-4244-1974-6
DOI :
10.1109/CAOL.2008.4671874
