Title :
4H-SiC Schottky photodiodes for ultraviolet light detection
Author :
Mazzillo, Massimo ; Sciuto, Antonella ; Roccaforte, Fabrizio ; Raineri, Vito
Author_Institution :
R&D, STMicroelectron., Catania, Italy
Abstract :
In recent years Silicon Carbide (SiC) photodiodes have been proposed for ultraviolet (UV) light detection because of their robustness even in harsh environments, high quantum efficiency in all the UV range (200 nm-400 nm), excellent visible blindness, low dark current and high speed. Here, we report on the electro-optical performances and use in application of high signal-to noise ratio low reverse biased 4H-SiC vertical Schottky photodiodes based on the pinch-off surface effect, obtained by means of self-aligned Nickel Silicide (Ni2Si) interdigitated contacts. The characteristics of these devices could make their use appealing also in nuclear applications like for example scintillation light detection.
Keywords :
Schottky diodes; nickel compounds; photodiodes; silicon compounds; ultraviolet detectors; Ni2Si; Schottky photodiode; SiC-H; dark current; electrooptical performances; interdigitated contact; pinch off surface effect; quantum efficiency; scintillation light detection; self aligned nickel silicide; silicon carbide photodiode; ultraviolet light detection; visible blindness; wavelength 200 nm to 400 nm; Capacitance-voltage characteristics; Monitoring;
Conference_Titel :
Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC), 2011 IEEE
Conference_Location :
Valencia
Print_ISBN :
978-1-4673-0118-3
DOI :
10.1109/NSSMIC.2011.6154652