• DocumentCode
    3356969
  • Title

    Evaluation Of Semiconductor Interfaces By Cathodoluminescence

  • Author

    Wada, Kazumi

  • Author_Institution
    NTT LSI Laboratories
  • fYear
    1990
  • fDate
    4-9 Nov 1990
  • Firstpage
    607
  • Lastpage
    610
  • Keywords
    Art; Carrier confinement; Electron beams; Gallium arsenide; Laboratories; Large scale integration; Lorentz covariance; Magnetic fields; Spatial resolution; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
  • Print_ISBN
    0-87942-550-4
  • Type

    conf

  • DOI
    10.1109/LEOS.1990.690695
  • Filename
    690695