Title :
3-DOF MEMS Gyroscope modeling and design
Author :
Xuguo Huang ; Ping Sun ; Zhi Wang
Author_Institution :
Chengdu Goldtel Electron. Technol. Co., Ltd., Chengdu, China
Abstract :
In this paper, issues related to the modeling and designs on a 3-DOF (degree-of-freedom) MEMS Gyroscope are studied. The MEMS Gyroscope employs a combination of two proof-masses and flexures to form 1-DOF resonator in the drive direction and 2-DOF oscillator in the sense direction. The 3-DOF MEMS Gyroscope has very stable responses within flat region for both gain and phase corresponding to variations in spring coefficient or quality factor. Through simulation and analyses, the gyroscope is optimized. The high operational frequency device (5.053 kHz) and bandwidth over 1 kHz is designed. In the full scale range ±5007s, the high scale factor about 0.527 mv/ (°/s) is achieved.
Keywords :
Q-factor; gyroscopes; micromachining; microsensors; oscillators; 1-DOF resonator; 3-DOF MEMS gyroscope modeling; drive direction; frequency 5.053 kHz; high operational frequency device; micromachined gyroscope; proof-masses; quality factor; spring coefficient; Frequency response; Gyroscopes; Micromechanical devices; Oscillators; Resonant frequency; Springs; Suspensions; MEMS gyroscope; Modeling and design; stable responses;
Conference_Titel :
Electronic and Mechanical Engineering and Information Technology (EMEIT), 2011 International Conference on
Conference_Location :
Harbin, Heilongjiang, China
Print_ISBN :
978-1-61284-087-1
DOI :
10.1109/EMEIT.2011.6023227
