Title :
Technology Trend To Manufacture Future VLSI Systems
Author :
Chiao, Sun ; Jiang, Jeng-Yaw
Author_Institution :
San Jose State University
Keywords :
BiCMOS integrated circuits; CMOS process; CMOS technology; Capacitance; Delay effects; Digital systems; EPROM; MOS devices; Manufacturing; Very large scale integration;
Conference_Titel :
Signals, Systems and Computers, 1988. Twenty-Second Asilomar Conference on
DOI :
10.1109/ACSSC.1988.754022
