Design, implementation, and assessment of a high-precision and automation measurement system for thin film resistivity

The paper presents the design and implementation of a novel measurement system for thin film resistivity based on four-point probe combination measurement method and virtual instrumentation technology. Interface circuit, digital output module and Keithley 2400 SourceMeter as well as computer running virtual instrumentation software, LabVIEW are involved in this system. Interface circuit is designed based on CD4052 chip, and it plays an important role in probes automatically switching between current and voltage under the control of computer running LabVIEW and digital output module hardware, NI 9401. Keithley 2400 SourceMeter is used for two times voltage measurement and Van der Pauw correction factor is calculated based on the two times measured voltages. The sheet resistance and resistivity of thin film are measured with LabVIEW for its powerful computing, data acquisition and instrument control. The results show that the designed system can meet the needs of thin film resistivity automatic measurement with a wide range, and can be characterized by high efficiency, high precision, easy control and simple operation. Based on this system measurement process for thin film resistivity has been simplified and the level of precision and automation in measurement has been improved.