• DocumentCode
    3358378
  • Title

    Applications Of Optical Scatterometry To Microelectronics. Materials Processing

  • Author

    McNeil, J.R.

  • Author_Institution
    University of New Mexico
  • fYear
    1990
  • fDate
    4-9 Nov 1990
  • Firstpage
    628
  • Lastpage
    628
  • Keywords
    Diffraction gratings; Light scattering; Materials processing; Microelectronics; Optical materials; Optical scattering; Radar measurements; Raman scattering; Rough surfaces; Surface roughness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
  • Print_ISBN
    0-87942-550-4
  • Type

    conf

  • DOI
    10.1109/LEOS.1990.690703
  • Filename
    690703
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3358378