Commentary: NanoMEMS

NanoMEMS exploits the convergence between nanotechnology and microelectromechanical systems (MEMS) brought about by advances in the ability to fabricate nanometer-scale electronic and mechanical device structures. While the "Nano" aspect of this field is in its infancy, and is not expected to reach maturity until well into the 21st century, its "MEMS" aspect is a topic of much current and near-term impact in, for instance, inertial sensing, biomedicine, optical and RF/Wireless communications. In this context, we will begin this talk by discussing the fundamentals of NanoMEMS, in particular, as it relates to its most speculative and futuristic paradigms and applications, and then will focus on the RF/Wireless MEMS aspect, specifically in its role as enabler of ubiquitous wireless connectivity. We conclude by pointing out potential pitfalls to be encountered in its development, in particular, by addressing the subjects of stiction and pull-in in the contexts of varactors (Casimir effect) and switches.