Abstract :
The present paper briefly discusses the questions of accuracy of depth profiling techniques in studies of mass transfer processes induced by intense pulsed ion beams (IPIB) in solids. The best measurement tools provide good precision only. An acceptable reproducibility, correctness, and, finally, accuracy of measurement are a result of complete elimination all of the systematic errors. The first ones are caused by a dependence of main SIMS and AES analytical characteristics, ionization coefficients and sputtering factors, on a degree of IPIB exposure. It is shown that the preferable application of nuclear analysis methods, RBS and PIGE, avoids these errors. A mechanical polishing conventionally applied for surface preparation of specimens under investigation engenders to unpredictable changing of mechanical, electric and thermodynamic properties of the surface layer, for at least 1 /spl mu/m depth in the case of Cu surface polishing and for the depth less than the previous one by the factor of 3-5 for /spl alpha/-Fe, steel, Zr, etc. Surface preparation with electrochemical polishing allows a second kind of error to be avoided. A third kind of systematic error is connected with vagueness of the main IPIB parameters (ion species, energy distribution, flux) at the investigated section of the modified sample. Use of more detailed specimens analyzed by cross section is suggested in order to avoid these errors.
Keywords :
Auger effect; Rutherford backscattering; copper; electrolytic polishing; ion beam effects; ion microprobe analysis; ionisation; iron; mass transfer; measurement errors; nuclear chemical analysis; secondary ion mass spectra; specimen preparation; sputtering; steel; zirconium; /spl alpha/-Fe; AES; Cu; Cu surface polishing; Fe; PIGE; RBS; SIMS; Zr; analytical characteristics; depth profiling techniques; electric properties; electrochemical polishing; energy distribution; intense pulsed ion beams; ion flux; ion species; ionization coefficients; mass transfer processes; mechanical polishing; mechanical properties; methodical errors; nuclear analysis methods; solids; sputtering factors; steel; surface preparation; systematic errors; thermodynamic properties; tools; Error correction; Ion beams; Ionization; Mechanical factors; Nuclear thermodynamics; Reproducibility of results; Solids; Sputtering; Steel; Zirconium;
