Early prediction of product performance and yield via technology benchmark

Author

Cho, Choongyeun ; Kim, Daeik D. ; Kim, Jonghae ; Lim, Daihyun ; Cho, Sangyeun

Author_Institution

Semicond. R&D Center, IBM, Hopewell Junction, NY

fYear

2008

fDate

21-24 Sept. 2008

Firstpage

205

Lastpage

208

Abstract

This paper presents a practical method to estimate IC product performance and parametric yield solely from a well-chosen set of existing electrical measurements intended for technology monitoring at an early stage of manufacturing. We demonstrate that the components of mmWave PLL and product-like logic performance in a 65 nm SOI CMOS technology are predicted within a 5% RMS error relative to mean.

Keywords

CMOS integrated circuits; integrated circuit manufacture; integrated circuit technology; integrated circuit yield; millimetre wave devices; phase locked loops; process monitoring; silicon-on-insulator; IC manufacturing; IC product performance; IC product yield; IC technology benchmark; IC technology monitoring; RMS error; SOI CMOS technology; electrical measurements; mmWave PLL; product-like logic performance; Benchmark testing; CMOS technology; Calibration; Circuit testing; Electric variables measurement; Integrated circuit modeling; Integrated circuit testing; Pulp manufacturing; Semiconductor device modeling; Yield estimation;

fLanguage

English

Publisher

ieee

Conference_Titel

Custom Integrated Circuits Conference, 2008. CICC 2008. IEEE

Conference_Location

San Jose, CA

Print_ISBN

978-1-4244-2018-6

Electronic_ISBN

978-1-4244-2019-3

Type

conf

DOI

10.1109/CICC.2008.4672059

Filename

4672059