DocumentCode
3359686
Title
Device characteristics of a quasi-SOI power MOSFET
Author
Matsumoto, Satoshi ; Ishiyama, Toshihiko ; Hiraoka, Yasushi ; Sakai, Tatsuo ; Yachi, Toshiaki ; Ito, Akio ; Arimoto, Yoshihiro
Author_Institution
NTT, Tokyo, Japan
fYear
1998
fDate
3-6 Jun 1998
Firstpage
29
Lastpage
32
Abstract
The device characteristics of a quasi-SOI power MOSFET were investigated to obtain its optimum device structure. Its short channel effect was larger than the conventional SOI power MOSFET. We analyzed this effect and found a way to suppress it
Keywords
optimisation; power MOSFET; semiconductor device testing; silicon-on-insulator; SOI power MOSFET; Si-SiO2; device characteristics; optimum device structure; quasi-SOI power MOSFET; short channel effect; Bipolar transistors; Body regions; Laboratories; MOSFET circuits; Numerical simulation; Power MOSFET; Silicon; Substrates; Surface resistance; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Semiconductor Devices and ICs, 1998. ISPSD 98. Proceedings of the 10th International Symposium on
Conference_Location
Kyoto
ISSN
1063-6854
Print_ISBN
0-7803-4752-8
Type
conf
DOI
10.1109/ISPSD.1998.702622
Filename
702622
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