DocumentCode

3359705

Title

Surface Micromachined Microengane As The Driver For Micromechanical Gears

Author

Garcia, Ernest J. ; Sniegowski, Jeffry J.

Author_Institution

Sandia National Laboratories

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

365

Lastpage

368

Keywords

Clocks; Electrostatics; Fabrication; Gears; Hydraulic actuators; Micromechanical devices; Pneumatic actuators; Scanning electron microscopy; Shape; Teeth;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717205

Filename

717205