Title :
Surface Micromachined Microengane As The Driver For Micromechanical Gears
Author :
Garcia, Ernest J. ; Sniegowski, Jeffry J.
Author_Institution :
Sandia National Laboratories
Keywords :
Clocks; Electrostatics; Fabrication; Gears; Hydraulic actuators; Micromechanical devices; Pneumatic actuators; Scanning electron microscopy; Shape; Teeth;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717205
