DocumentCode :
3360485
Title :
High speed electrostatic surface discharge between a charged thin film and a sphere electrode with or without a thin dielectric film on that
Author :
Oda, Tetsuji ; Sakai, Yutaka
Author_Institution :
Dept. of Electr. Eng., Tokyo Univ., Japan
fYear :
1992
fDate :
4-9 Oct. 1992
Firstpage :
1606
Abstract :
The electrostatic surface discharge (ESD) between a charged thin dielectric film on a conductive flat plate electrode and a sphere electrode that is connected to the plate, and is either covered with an uncharged thin dielectric film or fare, was observed. Discharge current waveform, discharge gap length, current risetime, discharge photographs, current peak value, etc. were recorded. The initial charge generation by irradiation with beta-rays or ultraviolet light was not readily apparent, so that the reproducibility of ESD experiments was not much improved. The charging polarity dependence of such a surface ESD between two dielectric films becomes small with increasing film thickness. The discharge gap length of an ESD with an 12.5 mu m uncharged film on the electrode reduces to 50 or 70% of that between a charged film and a sphere metal electrode. Peak current and transferred charge value of such an ESD also decreases to roughly one-third of that between the film and the electrode.<>
Keywords :
dielectric thin films; electric charge; electrodes; electrostatic discharge; 12.5 micron; charge generation; charging polarity; current risetime; electric charge; electrostatic surface discharge; gap length; sphere electrode; thin dielectric film; waveform; Current measurement; Dielectric films; Dielectric measurements; Dielectrics and electrical insulation; Electrodes; Electrostatic discharge; Electrostatic measurements; Reproducibility of results; Surface discharges; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industry Applications Society Annual Meeting, 1992., Conference Record of the 1992 IEEE
Conference_Location :
Houston, TX, USA
Print_ISBN :
0-7803-0635-X
Type :
conf
DOI :
10.1109/IAS.1992.244246
Filename :
244246
Link To Document :
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