Title :
A low drift, low noise detection IC applied to MEMS gyros
Author :
Levy, R. ; Dupret, A. ; Mathias, Herve ; Guerard, J.
Author_Institution :
Univ. Paris, Orsay
Abstract :
Today, the performance and size of micro-gyrometers are mainly limited by their associated electronics. Indeed detection electronics noise and drift induce respectively reduced resolution and stability whereas low drift associated electronics has not been studied. In order to increase the gyrometers performance, the development of a specific detection integrated circuit is presented and special care is taken on the low drift and low noise design.
Keywords :
gyroscopes; integrated circuit noise; micromechanical devices; MEMS gyros; associated electronics; drift induce respectively reduced resolution; electronics noise detection; low drift design; low noise detection IC; micro-gyrometers; specific detection integrated circuit; BiCMOS integrated circuits; Circuit stability; Demodulation; Integrated circuit noise; Mechanical sensors; Micromechanical devices; Piezoelectricity; Resonance; Thermal pollution; Vibrations;
Conference_Titel :
Electronics, Circuits and Systems, 2007. ICECS 2007. 14th IEEE International Conference on
Conference_Location :
Marrakech
Print_ISBN :
978-1-4244-1377-5
Electronic_ISBN :
978-1-4244-1378-2
DOI :
10.1109/ICECS.2007.4510927
