DocumentCode :
3361970
Title :
High-q thin film bulk acoustic wave resonator using highly [111]-oriented aluminum electrode
Author :
Ohara, R. ; Sano, K. ; Yanase, N. ; Yasumoto, T. ; Kawakubo, T. ; Itaya, K.
Volume :
1
fYear :
2005
fDate :
18-21 Sept. 2005
Firstpage :
206
Lastpage :
209
Keywords :
Acoustic waves; Aluminum; Amorphous materials; Crystalline materials; Crystallization; Electrodes; Fabrication; Film bulk acoustic resonators; Radio frequency; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1602832
Filename :
1602832
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3361970
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