Title :
RF MEMS resonators: Material properties extraction
Author :
Nada, Yasseen ; Stoffels, Steve ; Tilmans, Harrie A C ; Hegazi, Emad ; Ragai, Hani F. ; Shaarawi, Amr M.
Author_Institution :
American Univ. in Cairo, Cairo, Egypt
Abstract :
Analytical formula for the resonance frequencies of circular, square, and hexagonal MEMS resonators are extracted based on the analytical model for extensional vibrations of MEMS resonators. Material properties for the MEMS resonators are then extracted based on the analytical formula. Experimental measurement is done to extract the material properties of single crystal silicon MEMS resonators to verify the extraction method.
Keywords :
micromechanical resonators; microwave materials; RF MEMS resonators; Analytical models; Equations; Material properties; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Resonance; Resonant frequency; Resonator filters; Vibrations; Extensional Vibration; Material Properties; Micro-Electro-Mechanical Resonator; Modeling Microsystems; RF MEMS;
Conference_Titel :
Design and Test Workshop (IDT), 2009 4th International
Conference_Location :
Riyadh
Print_ISBN :
978-1-4244-5748-9
DOI :
10.1109/IDT.2009.5404127
