DocumentCode :
3362442
Title :
Is there a better material for thin film BAW applications than A1N?
Author :
Muralt, P. ; Antifakos, J. ; Cantoni, M. ; Lanz, R. ; Martin, F.
Volume :
1
fYear :
2005
fDate :
18-21 Sept. 2005
Firstpage :
315
Lastpage :
320
Keywords :
Aluminum nitride; Ferroelectric materials; Film bulk acoustic resonators; Microwave filters; Piezoelectric films; Piezoelectric materials; Q factor; Resonator filters; Semiconductor materials; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1602858
Filename :
1602858
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3362442
بازگشت