DocumentCode
3362451
Title
Synthesis of textured thin piezoelectric A1N films with a nonzero c-axis mean tilt for the fabrication of shear mode resonators
Author
Bjurström, J. ; Wingqvist, G. ; Katardjiev, I.
Volume
1
fYear
2005
fDate
18-21 Sept. 2005
Firstpage
321
Lastpage
324
Keywords
Acoustic devices; Acoustic sensors; Biosensors; Chemical and biological sensors; Fabrication; Film bulk acoustic resonators; Frequency; Piezoelectric films; Sensor phenomena and characterization; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2005 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-9382-1
Type
conf
DOI
10.1109/ULTSYM.2005.1602859
Filename
1602859
Link To Document