Title :
Synthesis of textured thin piezoelectric A1N films with a nonzero c-axis mean tilt for the fabrication of shear mode resonators
Author :
Bjurström, J. ; Wingqvist, G. ; Katardjiev, I.
Keywords :
Acoustic devices; Acoustic sensors; Biosensors; Chemical and biological sensors; Fabrication; Film bulk acoustic resonators; Frequency; Piezoelectric films; Sensor phenomena and characterization; Sputtering;
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
Print_ISBN :
0-7803-9382-1
DOI :
10.1109/ULTSYM.2005.1602859
