Title :
RF-MEMS switching concepts for high power applications
Author :
Strohm, K.M. ; Schauwecker, B. ; Pilz, D. ; Simon, W. ; Luy, J.-F.
Author_Institution :
Res. Center, Daimler-Chrysler AG, Ulm, Germany
Abstract :
RF MEMS switches for power applications are discussed in this paper. Mechanical and electromagnetic simulations of a new switch type for power applications are presented, and fabrication aspects are discussed.
Keywords :
microactuators; micromachining; microwave switches; power semiconductor switches; semiconductor device models; RF MEMS switches; RF-MEMS switching; electromagnetic simulation; high power applications; mechanical simulation; power applications; switch fabrication; switch type; Communication switching; Coplanar waveguides; Electrostatics; Gold; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Testing; Voltage;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2001. Digest of Papers. 2001 Topical Meeting on
Conference_Location :
Ann Arbor, MI, USA
Print_ISBN :
0-7803-7129-1
DOI :
10.1109/SMIC.2001.942338
