DocumentCode
3362812
Title
Semiconductor gas sensor using nano-sized oxide for high-sensitive detection of environment-related gases
Author
Shimanoe, Kengo ; Yuasa, Masayoshi ; Kida, Tetsuya ; Yamazoe, Noboru
Author_Institution
Kyushu Univ., Fukuoka, Japan
fYear
2011
fDate
18-21 Oct. 2011
Firstpage
38
Lastpage
43
Abstract
Semiconductor gas sensors are device consisting of sintered metal oxides, which can indicate target gas concentration by measuring the electric resistance of device. The gas sensors have been developed widely for detection of inflammable gases, toxic gases, odor gases, environmental-related gases and so on. As the materials, n-type oxides, such as SnO2, In2O3, WO3 and so on, are well known. For the material design of the semiconductor gas sensor, we have reported important three functions i.e. receptor function, transducer function and utility factor. In this presentation, the material design for high-sensitive detection of environmental-related gases is shown.
Keywords
electric resistance measurement; electronic noses; flammability; nanosensors; sintering; toxicology; electric resistance measurement; environment-related gas; environmental-related gas detection; high sensitive detection; inflammable gas detection; material design; n-type oxide; nanosized oxide; odor gas; receptor function; semiconductor gas sensor; sintered metal oxide; target gas concentration; toxic gas; transducer function; utility factor; Films; Gas detectors; Gases; Resistance; Sensitivity; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology Materials and Devices Conference (NMDC), 2011 IEEE
Conference_Location
Jeju
Print_ISBN
978-1-4577-2139-7
Type
conf
DOI
10.1109/NMDC.2011.6155309
Filename
6155309
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