DocumentCode :
3362812
Title :
Semiconductor gas sensor using nano-sized oxide for high-sensitive detection of environment-related gases
Author :
Shimanoe, Kengo ; Yuasa, Masayoshi ; Kida, Tetsuya ; Yamazoe, Noboru
Author_Institution :
Kyushu Univ., Fukuoka, Japan
fYear :
2011
fDate :
18-21 Oct. 2011
Firstpage :
38
Lastpage :
43
Abstract :
Semiconductor gas sensors are device consisting of sintered metal oxides, which can indicate target gas concentration by measuring the electric resistance of device. The gas sensors have been developed widely for detection of inflammable gases, toxic gases, odor gases, environmental-related gases and so on. As the materials, n-type oxides, such as SnO2, In2O3, WO3 and so on, are well known. For the material design of the semiconductor gas sensor, we have reported important three functions i.e. receptor function, transducer function and utility factor. In this presentation, the material design for high-sensitive detection of environmental-related gases is shown.
Keywords :
electric resistance measurement; electronic noses; flammability; nanosensors; sintering; toxicology; electric resistance measurement; environment-related gas; environmental-related gas detection; high sensitive detection; inflammable gas detection; material design; n-type oxide; nanosized oxide; odor gas; receptor function; semiconductor gas sensor; sintered metal oxide; target gas concentration; toxic gas; transducer function; utility factor; Films; Gas detectors; Gases; Resistance; Sensitivity; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology Materials and Devices Conference (NMDC), 2011 IEEE
Conference_Location :
Jeju
Print_ISBN :
978-1-4577-2139-7
Type :
conf
DOI :
10.1109/NMDC.2011.6155309
Filename :
6155309
Link To Document :
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