Title :
cMUTs and electronics for 2D and 3D imaging: monolithic integration, in-handle chip sets and system implications
Author :
Daft, Chris ; Wagner, Paul ; Bymaster, Brett ; Panda, Satchi ; Patel, Kirti ; Ladabaum, Igal
Keywords :
Biomedical imaging; Biomedical transducers; Fabrication; High-resolution imaging; Micromechanical devices; Monolithic integrated circuits; Probes; Silicon; Ultrasonic imaging; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
Print_ISBN :
0-7803-9382-1
DOI :
10.1109/ULTSYM.2005.1602893