Title :
Capacitive micromachined ultrasonic transducer (cMUT) made by a novel "reverse fabrication process"
Author :
Caliano, G. ; Caronti, A. ; Savoia, A. ; Longo, C. ; Pappalardo, M. ; Cianci, E. ; Foglietti, V.
Keywords :
Biomembranes; Circuits; Coatings; Electrodes; Electrostatics; Fabrication; Micromachining; Signal generators; Silicon; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
Conference_Location :
Rotterdam, The Netherlands
Print_ISBN :
0-7803-9382-1
DOI :
10.1109/ULTSYM.2005.1602895
