Capacitive micromachined ultrasonic transducer (cMUT) made by a novel "reverse fabrication process"

Author

Caliano, G. ; Caronti, A. ; Savoia, A. ; Longo, C. ; Pappalardo, M. ; Cianci, E. ; Foglietti, V.

Volume

fYear

2005

fDate

18-21 Sept. 2005

Firstpage

479

Lastpage

482

Keywords

Biomembranes; Circuits; Coatings; Electrodes; Electrostatics; Fabrication; Micromachining; Signal generators; Silicon; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2005 IEEE

Conference_Location

Rotterdam, The Netherlands

ISSN

1051-0117

Print_ISBN

0-7803-9382-1

Type

DOI

10.1109/ULTSYM.2005.1602895

Filename

1602895

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