The research of temperature compensation technology of high-temperature pressure sensor

Silicon piezoresistive pressure sensor is a kind of sensor with excellent performance, wide range of applications. But its sensitive components make itself vulnerable to temperature, only by solving the problem of temperature compensation can improve the accuracy, stability and other important performance. The high temperature and high pressure silicon pressure sensor actual operating temperature range is (- 55°C ~ + 175°C); its hardware compensated temperature range is (+ 25°C ~ + 80°C) which is narrower than its actual operating temperature range, zero drift maximum reach 0.65%FS/10°C. These can not reach the using requirement. This article has analyzed the experimental data of this pressure sensor in the full operating temperature range. According to the characteristics of different temperature interval, the method of software compensation has been used to reduce zero temperature drift rate by an order of magnitude. Experiments prove that the piecewise polynomial fitting method which this article uses has good effect, and good applicability in compensating zero-point temperature drift and the original sensor unbalance, worth extending.