Title :
Fabrication and surface functionalization of single TiO2 nanotubes devices for bio-chemical sensors applications
Author :
Lee, Mingun ; Huang, Jie ; Lucero, Antonio ; Kim, Moon J. ; Kim, Jiyoung
Author_Institution :
Univ. of Texas at Dallas, Richardson, TX, USA
Abstract :
A single TiO2 nanotube device has been successfully fabricated using both FIB deposition technique and conventional Si process. The device shows linear I-V characteristics implying ohmic contact. The device shows conductance modulation when it is functionalized by lysine and GABA. Surface modification is confirmed by monitoring the resistance change of TiO2 nanotube. In this study, fabrication of single TiO2 nanotube devices and the effect on conductance of the nanotube devices by surface modification will be discussed for bio-chemcial sensor applications.
Keywords :
biosensors; chemical sensors; focused ion beam technology; nanobiotechnology; nanofabrication; nanotube devices; nanotubes; ohmic contacts; titanium compounds; FIB deposition; GABA; TiO2; biochemical sensors; conductance modulation; lysine; ohmic contact; resistance change; single TiO2 nanotubes; surface functionalization; surface modification; Gold; Surface treatment;
Conference_Titel :
Nanotechnology Materials and Devices Conference (NMDC), 2011 IEEE
Conference_Location :
Jeju
Print_ISBN :
978-1-4577-2139-7
DOI :
10.1109/NMDC.2011.6155329
