DocumentCode
3363179
Title
Fabrication and surface functionalization of single TiO2 nanotubes devices for bio-chemical sensors applications
Author
Lee, Mingun ; Huang, Jie ; Lucero, Antonio ; Kim, Moon J. ; Kim, Jiyoung
Author_Institution
Univ. of Texas at Dallas, Richardson, TX, USA
fYear
2011
fDate
18-21 Oct. 2011
Firstpage
143
Lastpage
146
Abstract
A single TiO2 nanotube device has been successfully fabricated using both FIB deposition technique and conventional Si process. The device shows linear I-V characteristics implying ohmic contact. The device shows conductance modulation when it is functionalized by lysine and GABA. Surface modification is confirmed by monitoring the resistance change of TiO2 nanotube. In this study, fabrication of single TiO2 nanotube devices and the effect on conductance of the nanotube devices by surface modification will be discussed for bio-chemcial sensor applications.
Keywords
biosensors; chemical sensors; focused ion beam technology; nanobiotechnology; nanofabrication; nanotube devices; nanotubes; ohmic contacts; titanium compounds; FIB deposition; GABA; TiO2; biochemical sensors; conductance modulation; lysine; ohmic contact; resistance change; single TiO2 nanotubes; surface functionalization; surface modification; Gold; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology Materials and Devices Conference (NMDC), 2011 IEEE
Conference_Location
Jeju
Print_ISBN
978-1-4577-2139-7
Type
conf
DOI
10.1109/NMDC.2011.6155329
Filename
6155329
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