Design of a double cavities piezoelectric peristaltic pump with finite element method

A new type of piezoelectric peristaltic pump which contains two cavities is designed in this paper. The peristaltic pump is driven by travelling wave of the piezoelectric actuator which is designed according to the vibration principle of annular circular plate. The finite element model of the actuator is built in ANSYS and according to the harmonic response analysis results the structure of the actuator is designed. Through this design both the positive and negative direction vibration of annular piezoelectric element can be fully utilized. The flow rate of the pump could be significantly improved. The heat generated by the annular piezoelectric can be taken away by the floating liquid at the same time. Stability of piezoelectric peristaltic pump is improved.