Title :
A 2 pole micromachined bandpass filter at 150 GHz
Author :
Hajj, R. ; Chatras, Matthieu ; Blondy, Pierre ; Orlhac, J.C.
Author_Institution :
XLIM Res. Inst., Limoges
Abstract :
The conception of a two pole micromachined bandpass filter at 150 GHz is presented. By exploring a coplanar to microstrip transition, from a silicon substrate to air with a 3D electromagnetic computation, a ground layer between the membrane and the substrate has been used to avoid substrate modes in the filter accesses. An adaptation higher than 30 dB has been obtained in the bandpass and the computed unloaded quality factor is 560. The bandwidth is 6% and the insertion losses of the filter are lower than 1 dB.
Keywords :
Q-factor; band-pass filters; elemental semiconductors; micromechanical devices; millimetre wave filters; silicon; small electric machines; 3D electromagnetic computation; Si; frequency 150 GHz; micromachined bandpass filter; microstrip transition; quality factor; Band pass filters; Biomembranes; Circuits; Coplanar waveguides; Fabrication; Frequency; Insertion loss; Resonator filters; Silicon; Submillimeter wave filters;
Conference_Titel :
Electronics, Circuits and Systems, 2007. ICECS 2007. 14th IEEE International Conference on
Conference_Location :
Marrakech
Print_ISBN :
978-1-4244-1377-5
Electronic_ISBN :
978-1-4244-1378-2
DOI :
10.1109/ICECS.2007.4511054
