DocumentCode
3363522
Title
Piezoelectric Cantilever Beams Actuated By PZT Sol-gel Thin Film
Author
Luginbubl, P. ; Racine, G.A. ; Lerch, Ph. ; Romanowicz, B. ; Brooks, K.G. ; de Rooij, N.F. ; Renaud, Ph ; Setter, N.
Author_Institution
University Of Neuchatel
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
413
Lastpage
416
Keywords
Displacement measurement; Finite element methods; Frequency measurement; Laser excitation; Mechanical variables measurement; Piezoelectric films; Silicon; Structural beams; Substrates; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717224
Filename
717224
Link To Document