DocumentCode :
3363522
Title :
Piezoelectric Cantilever Beams Actuated By PZT Sol-gel Thin Film
Author :
Luginbubl, P. ; Racine, G.A. ; Lerch, Ph. ; Romanowicz, B. ; Brooks, K.G. ; de Rooij, N.F. ; Renaud, Ph ; Setter, N.
Author_Institution :
University Of Neuchatel
Volume :
1
fYear :
1995
fDate :
25-29 Jun 1995
Firstpage :
413
Lastpage :
416
Keywords :
Displacement measurement; Finite element methods; Frequency measurement; Laser excitation; Mechanical variables measurement; Piezoelectric films; Silicon; Structural beams; Substrates; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.717224
Filename :
717224
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3363522
