Fabrication and properties of nano scale anti-static film by multilayered surface treatment

Author

Yoo, Jaimoo ; Yeo, Kiho ; Moon, Jongchul ; So, Jisung ; Kim, Namwoog ; Lim, Sunghwan ; Jun, Youngha

Author_Institution

J & L Tech. Co. Ltd., Ansan, South Korea

fYear

2011

fDate

18-21 Oct. 2011

Firstpage

271

Lastpage

275

Abstract

In this work, we fabricated multilayer type anti-static film including few nano scale thickness of hydrogenated amorphous carbon (DLC) layer and metallic conductive layer, by hybrid coating system which is comprised of linear ion gun and magnetron sputter. Surface resistance can be controllable in the range of 10³ ~ 10¹⁰Ω by controlling the thickness. With the benefit of few nano scale coating, this technique can have the maximum processing speed and save raw coating materials, compared to conventional coating method for processing anti-static film. Also discussed are the microstructural aspects of this newly developed anti-static film.

Keywords

amorphous state; coatings; diamond-like carbon; metallic thin films; multilayers; nanofabrication; nanostructured materials; sputter deposition; sputtered coatings; surface resistance; titanium; C-Ti; hybrid coating system; hydrogenated amorphous carbon layer; linear ion gun; magnetron sputter; metallic conductive layer; microstructural aspect; multilayer type antistatic film; multilayered surface treatment; nanoscale antistatic film; nanoscale coating; nanoscale thickness; surface resistance; Argon; Carbon; Cleaning; Coatings; Magnetic films; Magnetic resonance imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology Materials and Devices Conference (NMDC), 2011 IEEE

Conference_Location

Jeju

Print_ISBN

978-1-4577-2139-7

Type

conf

DOI

10.1109/NMDC.2011.6155347

Filename

6155347