• DocumentCode
    3363661
  • Title

    Ferroelectric properties of Pt/SrRuO3/PLZT/Pt capacitors

  • Author

    Kobune, M. ; Matsuura, O. ; Matsuzaki, T. ; Mineshige, A. ; Fujii, S.

  • Author_Institution
    Dept. of Appl. Chem., Himeji Inst. of Technol., Hyogo, Japan
  • Volume
    2
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    575
  • Abstract
    The microstructure, leakage current density-electric field characteristics and fatigue characteristics for epitaxial c-axis oriented (Pb0.925La0.075)(Zr0.4Ti0.6 )O3, (PLZT) ferroelectric capacitors with layered Pt/SrRuO3 (SRO) top electrodes were investigated on PLZT films with thickness ranging from 100 to 400 nm. The leakage current for Pt/SRO/PLZT/Pt capacitors exhibited a tendency to increase with decreasing film thickness. The values of switchable polarization after 1010 cycles for Pt/PLZT/Pt capacitors as reference samples decreased up to around 17% of respective initial values, whereas the switchable polarization for Pt/SRO/PLZT/Pt capacitors showed no fatigue degradation due to polarization reversal until 1010 cycles
  • Keywords
    dielectric hysteresis; dielectric losses; dielectric polarisation; ferroelectric capacitors; ferroelectric switching; ferroelectric thin films; lanthanum compounds; lead compounds; leakage currents; permittivity; platinum; strontium compounds; 100 to 400 nm; P-E hysteresis loops; Pt-SrRuO3-PbLaZrO3TiO3-Pt; Pt-SrRuO3-PLZT-Pt; Pt/SrRuO3/PLZT/Pt capacitors; SEM photographs; dielectric loss; epitaxial c-axis oriented (Pb0.925La0.075)(Zr0.4Ti0.6 )O3 ferroelectric capacitors; fatigue characteristics; fatigue degradation; ferroelectric properties; layered Pt/SrRuO3 top electrodes; leakage current density electric field characteristics; microstructure; polarization reversal; relative dielectric constant; switchable polarization; Capacitors; Degradation; Electrodes; Fatigue; Ferroelectric films; Ferroelectric materials; Leakage current; Microstructure; Polarization; Zirconium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on
  • Conference_Location
    Honolulu, HI
  • ISSN
    1099-4734
  • Print_ISBN
    0-7803-5940-2
  • Type

    conf

  • DOI
    10.1109/ISAF.2000.942386
  • Filename
    942386
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3363661