Development of a MEMS test platform for investigating the use of multi-walled CNT composites electric contacts

The use of gold-coated multi-walled carbon nanotube (Au/MWCNT) composites have been shown to extend the life of electrical contacts, in previous work. Due to the long lifetimes (which are of the order of 10⁶ up to 10⁸ cycles) the lifetime testing tends to be highly time consuming. In this work we discuss the design and development of an electrostatically actuated MEMS cantilever beam which enables testing at higher frequencies than our previous experimental rig. Following calculations using fundamental cantilever beam equations, a computational model of the designed beam was developed to accurately predict the characteristics of the beam, including the resonant frequency, pull-in voltage and contact force. Where possible the values from the model have been compared with the fabricated MEMS cantilever beam. A MEMS-based electrostatically actuated cantilever beam has been fabricated and incorporated with Au/MWCNT composite surfaces to form a MEMS switch test platform. Initial results show the improved performance over a PZT based test platform.