Structural dynamics design of axial/radial coupling non-contact piezoeletric ultrasonic motor with a spherical rotor

In this paper, an axial/radial coupling spherical rotor non-contact piezoelectric actuator is presented, the actuator consists of an axial suspension device and a radial suspension device, and traveling waves can be formed under the incentive specific conditions, which apply suspension force and driving force for the spherical rotor. Improved the axial device structure and constraints in order to optimize its suspension and drive effect for the spherical rotor, the finite element model of the axial / radial suspension device is built and dynamics analysis and design are done on the two parts respectively. Established a sound and solid coupling model to acquire the kinetic mechanism of suspension and drive force, and acquired the relationship between sound pressure distribution and vibration amplitude as well as the relationship between the suspended mass and the gap. On this basis determined the structure and manufactured a prototype and tested the radial stator vibration parameters to provide a basis for further optimization.