Title :
Design and simulation of tin oxide nanoscale thin film gas sensors
Author :
Lin, Chen ; Zhang, Dacheng ; Liu, Xiaodi
Author_Institution :
Dept. of Microelectron., Peking Univ., Beijing, China
Abstract :
Current crowding effects on the metal electrode and temperature uniformity on the tin oxide nanoscale thin film in the gas sensor are two of the most important concerns. They are mostly determined by the current density distribution of the heater and the temperature distribution of the gas sensing film. In order to improve the reliability and selectivity of the gas sensor, the geometry of the heater is optimized in this paper. Structures of heaters and tin oxide thin film gas sensors are modeled for optimization using ANSYS™.
Keywords :
current density; current distribution; gas sensors; nanosensors; nanostructured materials; optimisation; temperature distribution; thin film sensors; tin compounds; SnO2; current crowding effects; current density distribution; gas sensors; nanoscale thin film sensors; optimization; reliability; temperature distribution; Fires; Heating; IP networks;
Conference_Titel :
Nanotechnology Materials and Devices Conference (NMDC), 2011 IEEE
Conference_Location :
Jeju
Print_ISBN :
978-1-4577-2139-7
DOI :
10.1109/NMDC.2011.6155384
