• DocumentCode
    3364385
  • Title

    Design and simulation of tin oxide nanoscale thin film gas sensors

  • Author

    Lin, Chen ; Zhang, Dacheng ; Liu, Xiaodi

  • Author_Institution
    Dept. of Microelectron., Peking Univ., Beijing, China
  • fYear
    2011
  • fDate
    18-21 Oct. 2011
  • Firstpage
    391
  • Lastpage
    395
  • Abstract
    Current crowding effects on the metal electrode and temperature uniformity on the tin oxide nanoscale thin film in the gas sensor are two of the most important concerns. They are mostly determined by the current density distribution of the heater and the temperature distribution of the gas sensing film. In order to improve the reliability and selectivity of the gas sensor, the geometry of the heater is optimized in this paper. Structures of heaters and tin oxide thin film gas sensors are modeled for optimization using ANSYS™.
  • Keywords
    current density; current distribution; gas sensors; nanosensors; nanostructured materials; optimisation; temperature distribution; thin film sensors; tin compounds; SnO2; current crowding effects; current density distribution; gas sensors; nanoscale thin film sensors; optimization; reliability; temperature distribution; Fires; Heating; IP networks;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology Materials and Devices Conference (NMDC), 2011 IEEE
  • Conference_Location
    Jeju
  • Print_ISBN
    978-1-4577-2139-7
  • Type

    conf

  • DOI
    10.1109/NMDC.2011.6155384
  • Filename
    6155384
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3364385