Title :
Acquisition of modulated PZT signal and application of SEAM
Author :
Yang, Yang ; Zhang, Bingyang ; Jiang, Fuming ; Hui, Senxing ; Yin, Qingrui
Author_Institution :
Inst. of Ceramics, Acad. Sinica, Shanghai, China
Abstract :
PZT transducers can be used to measure the characteristics of materials irradiated by laser or electron beams. In order to maintain high measurement resolution, the signal aroused on the transducer is modulated to produce a modulated PZT signal. Signal acquisition is accomplished with a lock-in amplifier and computer technologies. A typical application is SEAM (Scanning Electrical Acoustic Microscopy). The SEAM image reflects the thermal characteristics of materials. Furthermore, the SEAM image can supply subsurface information without destroying the sample
Keywords :
acoustic microscopy; acoustic signal detection; lead compounds; piezoceramics; piezoelectric transducers; scanning electron microscopy; ultrasonic materials testing; PZT; PZT transducers; PbZrO3TiO3; SEAM; computer technologies; digital imaging system; electron beam irradiation; high measurement resolution; laser beam irradiation; lock-in amplifier; modulated PZT signal acquisition; scanning electrical acoustic microscopy; subsurface information; thermal characteristics; Acoustic beams; Acoustic measurements; Acoustic transducers; Acoustic waves; Amplifiers; Electron beams; Energy measurement; Inorganic materials; Microscopy; Optical modulation;
Conference_Titel :
Electrets, 1996. (ISE 9), 9th International Symposium on
Conference_Location :
Shanghai
Print_ISBN :
0-7803-2695-4
DOI :
10.1109/ISE.1996.578264
