Title :
Detectivities of thin film NTC infrared sensors
Author :
Yoo, Mina ; Kim, Dohoon ; Lee, Sangil ; Park, Byounggun ; Bae, Seongho ; Lee, Moonho
Author_Institution :
Dept. of Appl. Electron., Yeungnam Univ., Kyungsan, South Korea
Abstract :
Detecting characteristics of thin-film NTC infrared sensors fabricated by micromachining technology were studied. In order to reduce the thermal mass and increase the responsivity, the sensing element was built-up on a thin membrane. The overall structure of detector had a form of Au/Ti/NTC/SiOx/(100)Si. Detecting characteristics of NTC sensor were monitored by the dynamic method. B, TCR and R25°C of sensors are 3,249K, 3.7%/°C and 4MΩ, which are suitable for bolometer applications. And, the rise time is 80msec, so it is appropriate for thermal sensors
Keywords :
bolometers; cobalt compounds; elemental semiconductors; gold; infrared detectors; manganese compounds; micromachining; nickel compounds; silicon; silicon compounds; thermistors; titanium; 4 Mohm; 80 ms; Au-Ti-MnCoNiO-SiOx-Si; Au/Ti/MnCoNiO/SiOx /(100)Si; bolometer applications; dynamic method; micromachining technology; negative temperature coefficient thermistor; responsivity; rise time; sensing element; thermal mass; thermal sensors; thin film NTC infrared sensors; Biomembranes; Bolometers; Gold; Infrared detectors; Infrared sensors; Micromachining; Monitoring; Sensor phenomena and characterization; Thermal sensors; Thin film sensors;
Conference_Titel :
Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-5940-2
DOI :
10.1109/ISAF.2000.942437
