DocumentCode
3364836
Title
Dynamics investigation of XY table for IC packaging
Author
Feng, X.M. ; Li, L.S. ; Tian, G.C. ; Zhang, D.W.
Author_Institution
Dept. of Mil. Logistics, Acad. of Mil. Transp., Tianjin, China
fYear
2010
fDate
26-28 June 2010
Firstpage
3389
Lastpage
3392
Abstract
VCA direct-drive XY table with a novel elastic decoupling mechanism is put forward. Which realizes the X and Y axial motion decoupling, diminishing its moving inertia, improving its dynamic performance. By establishing dynamical model of VCA and positioning table, X and Y axial positioning system dynamical characteristics is detailed respectively. The prototype experiment shows that the new XY table is of finer performance than the traditional ones.
Keywords
actuators; elasticity; integrated circuit packaging; IC packaging; VCA; XY table; axial motion decoupling; axial positioning system dynamical characteristics; dynamic investigation; elastic decoupling mechanism; voice coil actuator; Acceleration; Conductors; Fasteners; Gratings; High speed integrated circuits; Integrated circuit modeling; Integrated circuit packaging; Interference elimination; Springs; Vehicle dynamics; XY table; decoupling mechanism; dynamical model; dynamical simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechanic Automation and Control Engineering (MACE), 2010 International Conference on
Conference_Location
Wuhan
Print_ISBN
978-1-4244-7737-1
Type
conf
DOI
10.1109/MACE.2010.5536541
Filename
5536541
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