Title :
Piezoelectric micromachined transducers (PMUT´s) based on PZT thin films
Author :
Baborowski, Jacek ; Ledermann, Nicolas ; Muralt, Paul
Author_Institution :
Ceramics Lab., Swiss Fed. Inst. of Technol. EPFL, Lausanne, Switzerland
Abstract :
Test structures for piezoelectric micromachined ultrasonic transducers have been fabricated and investigated. The basic element consisted of a silicon membrane coated with a 2 μm thick (100)-textured Pb(Zr,Ti)O3 (PZT) thin film deposited by sol-gel techniques. SOI wavers have been applied to obtain a good definition of the silicon part of the membrane. Test devices have been characterized in air and in an insulating liquid.
Keywords :
lead compounds; micromachining; piezoelectric thin films; piezoelectric transducers; sol-gel processing; ultrasonic transducers; 2 micron; PZT; PZT thin films; PbZrO3TiO3; SOI wavers; piezoelectric micromachined transducers; sol-gel techniques; test structures; ultrasonic transducers; Biomembranes; Dielectric liquids; Insulation; Piezoelectric films; Piezoelectric transducers; Semiconductor thin films; Silicon on insulator technology; Sputtering; Testing; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1192475
