• DocumentCode
    3364972
  • Title

    Piezoelectric micromachined transducers (PMUT´s) based on PZT thin films

  • Author

    Baborowski, Jacek ; Ledermann, Nicolas ; Muralt, Paul

  • Author_Institution
    Ceramics Lab., Swiss Fed. Inst. of Technol. EPFL, Lausanne, Switzerland
  • Volume
    2
  • fYear
    2002
  • fDate
    8-11 Oct. 2002
  • Firstpage
    1051
  • Abstract
    Test structures for piezoelectric micromachined ultrasonic transducers have been fabricated and investigated. The basic element consisted of a silicon membrane coated with a 2 μm thick (100)-textured Pb(Zr,Ti)O3 (PZT) thin film deposited by sol-gel techniques. SOI wavers have been applied to obtain a good definition of the silicon part of the membrane. Test devices have been characterized in air and in an insulating liquid.
  • Keywords
    lead compounds; micromachining; piezoelectric thin films; piezoelectric transducers; sol-gel processing; ultrasonic transducers; 2 micron; PZT; PZT thin films; PbZrO3TiO3; SOI wavers; piezoelectric micromachined transducers; sol-gel techniques; test structures; ultrasonic transducers; Biomembranes; Dielectric liquids; Insulation; Piezoelectric films; Piezoelectric transducers; Semiconductor thin films; Silicon on insulator technology; Sputtering; Testing; Ultrasonic transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-7582-3
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2002.1192475
  • Filename
    1192475
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3364972