• DocumentCode
    3365030
  • Title

    A novel methdod for processing capacitive micromechanical ultrasonic transducers (cMUT)

  • Author

    Saarilahti, J. ; Blomberg, M. ; Haard, A. ; Kattelus, H.

  • Author_Institution
    VTT, Centre for Microelectron., Espoo, Finland
  • Volume
    2
  • fYear
    2002
  • fDate
    8-11 Oct. 2002
  • Firstpage
    1071
  • Abstract
    The cMUTs presented in this study are based on a new surface micromachining process, where part of the top electrode of the cMUT is fabricated of porous polysilicon. This method gives many advantages over the previously reported fabrication processes.
  • Keywords
    capacitive sensors; elemental semiconductors; micromachining; porous semiconductors; silicon; surface treatment; ultrasonic transducers; Si; cMUT; capacitive micromechanical ultrasonic transducers; fabrication processes; porous polysilicon; surface micromachining process; top electrode; Biomembranes; Capacitors; Conducting materials; Electrodes; Etching; Fabrication; Micromachining; Micromechanical devices; Silicon; Ultrasonic transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
  • Conference_Location
    Munich, Germany
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-7582-3
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2002.1192480
  • Filename
    1192480
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3365030