Title :
Simulation of cMUT radiating in water using a mixed finite element/boundary element approach
Author :
Ballandras, S. ; Caronti, A. ; Stelchen, W. ; Wilm, M. ; Laude, V. ; Pastureaud, T. ; Lardat, R. ; Daniau, W.
Author_Institution :
LPMO/CNRS - Universite de Franche-Comte, Besancon, France
Abstract :
A 2D finite element analysis of cMUT is proposed, taking into account periodicity and radiation in fluids. The convergence of the calculation is verified using non periodic computations. The capability of cMUT radiating in water to generate low velocity wave guided at the fluid/silicon interface is theoretically pointed out.
Keywords :
boundary-elements methods; convergence of numerical methods; elemental semiconductors; finite element analysis; micromechanical devices; silicon; ultrasonic transducers; underwater sound; 2D finite element analysis; cMUT; fluid/silicon interface; low velocity wave; micromachined ultrasound transducer; mixed finite element/boundary element approach; nonperiodic computations; periodicity; simulation; water; Acoustic transducers; Analytical models; Biomembranes; Computational modeling; Convergence; Electrostatics; Finite element methods; Periodic structures; Ultrasonic imaging; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1192481
