Title :
Tunable and switchable resonators and filters based on ferroelectric BST thin films for wireless communications
Author :
Kalkur, T.S. ; Mansour, Almonir
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Colorado, Springs, CO, USA
Abstract :
BAW resonators and filters with BST thin film are attracting the attention of many investigators because of their tunability and ability to switch with the applied bias voltage. In this paper, we will present our work on solidly mounted bulk acoustic resonators, filters and duplexers with spin-on metal organic solution deposited (MOSD) Barium Strontium Titanate(BST) films. Our recent research has shown that, the composite BST BAW fabricated with central floating electrode shows multiple modes of operation (low frequency mode and high frequency mode). Therefore, these composite resonators can be used to fabricate multiband resonators and filters.
Keywords :
acoustic filters; acoustic resonators; barium compounds; bulk acoustic wave devices; strontium compounds; thin film devices; BAW filters; BAW resonators; BaSrTiO3; applied bias voltage; composite resonators; ferroelectric BST thin films; floating electrode; frequency mode; multiband filters; multiband resonators; multiple modes; solidly mounted bulk acoustic resonators; spin-on metal organic solution deposited barium strontium titanate films; switchable resonators; tunable resonators; wireless communications; Electrodes; Film bulk acoustic resonators; Microwave filters; Resonant frequency; Resonator filters; Switches; BPF; SMR; bulk acoustic wave (BAW); switchable; tunable;
Conference_Titel :
Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop (ISAF/ISIF/PFM), 2015 Joint IEEE International Symposium on the
Conference_Location :
Singapore
DOI :
10.1109/ISAF.2015.7172654