Title :
Design of a new ferroelectrics-silicon integrated microphone and microspeaker
Author :
Tian-Ling, Ren ; Lin-Tao, Zhang ; Li-Tian, Liu ; Zhi-Jian, Li
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
A new ferroelectrics-silicon integrated microphone and microspeaker is proposed. The Pt/Pb(Zr,Ti)O3/Pt/SiO2 /Si3N4 cantilever structure is designed theoretically using multimorph model. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker are calculated. It is found that the sensitivity of the microphone and the SPL of the microspeaker are very high. The new integrated microphone and microspeaker will be valuable for high quality micro-acoustic devices
Keywords :
elemental semiconductors; ferroelectric devices; lead compounds; loudspeakers; microphones; microsensors; silicon; Pt-PZT-Pt-SiO2-Si3N4; Pt-PbZrO3TiO3-Pt-SiO2-Si3N4; Pt/Pb(Zr,Ti)O3/Pt/SiO2/Si3N 4 cantilever structure; Si; ferroelectric-silicon integrated microphone/microspeaker; micro-acoustic device; multimorph model; sensitivity; sound pressure level; Air gaps; Electrodes; Fabrication; Ferroelectric materials; Hearing aids; Microelectronics; Microphones; Piezoelectric materials; Piezoelectric transducers; Silicon;
Conference_Titel :
Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-5940-2
DOI :
10.1109/ISAF.2000.942459
