Title :
Static analysis of millimeter wave transmission lines micromachined in silicon substrate
Author :
Wenzhang Wang ; Yong Guo
Author_Institution :
Dept. of Electr. & Comput. Eng., Clemson Univ., SC, USA
Abstract :
Several millimeter wave transmission lines fabricated on silicon substrate are investigated numerically. The structures of this kind of transmission lines consist of metal strips evaporated on oxynitride membrane with a silicon substrate as the mechanical supporting materials. The characteristic impedances for single strip transmission lines and coupled transmission lines are obtained as functions of the physical parameters by the point matching method.
Keywords :
impedance matching; micromachining; microstrip lines; millimetre wave devices; silicon; strip lines; transmission line theory; transmission lines; Si; characteristic impedance; coupled transmission lines; mechanical supporting materials; metal strips; micromachined millimeter wave transmission lines; oxynitride membrane; physical parameters; point matching method; silicon substrate; static analysis; Biomembranes; Coaxial components; Conductors; Distributed parameter circuits; Millimeter wave technology; Silicon; Strips; Submillimeter wave propagation; Substrates; Transmission lines;
Conference_Titel :
Antennas and Propagation Society International Symposium, 1994. AP-S. Digest
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-2009-3
DOI :
10.1109/APS.1994.408152
