DocumentCode
3366314
Title
High luminance nano-structured zinc oxide thin film fabrication
Author
Chaoyang Li ; Kawaharamura, Toshiyuki ; Dapeng Wang ; Xin Li ; Hatta, Akimitsu
Author_Institution
Inst. for Nanotechnol., Kochi Univ. of Technol., Kami, Japan
fYear
2013
fDate
6-9 July 2013
Firstpage
77
Lastpage
78
Abstract
ZnO nanorods were fabricated on as-deposited ZnO film with catalyst free method. The ZnO nanorods could be well-ordered with optimizing the parameters during radio frequency magnetron deposition and reducing annealing processed. The high blue-green photoluminescence could be observed from ZnO nanorods on Si substrate.
Keywords
II-VI semiconductors; annealing; nanofabrication; nanorods; photoluminescence; semiconductor thin films; sputter deposition; wide band gap semiconductors; zinc compounds; Si substrate; ZnO; annealing; catalyst free method; luminance; nanorods; nanostructured thin film; photoluminescence; radiofrequency magnetron deposition; zinc oxide thin film; Annealing; Films; Indium tin oxide; Magnetic field measurement; Magnetic resonance imaging; Zinc oxide; Nanostructures; ZnO; photoluminescence; reducing annealing;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Infocomm Technology (ICAIT), 2013 6th International Conference on
Conference_Location
Hsinchu
Print_ISBN
978-1-4799-0464-8
Type
conf
DOI
10.1109/ICAIT.2013.6621502
Filename
6621502
Link To Document