Integration of Pb(Zr,Ti)O3 thin films with photo-sensitive polymer

Author

Okubo, Takashi ; Sano, Ryo ; Kanda, Kensuke ; Fujita, Takayuki ; Maenaka, Kazusuke

Author_Institution

Grad. Sch. of Eng., Univ. of Hyogo, Himeji, Japan

fYear

2015

fDate

24-27 May 2015

Firstpage

178

Lastpage

181

Abstract

This paper reports a batch fabrication process combining piezoelectric Pb(Zr,Ti)O₃ (PZT) thin films with photosensitive polymer SU-8. Fabricated PZT/SU-8 structure shows small stiffness and less brittleness. In addition, the piezoelectric characteristics are equivalent to conventional PZT thin films on Si substrates. From the result of actuation experiments of cantilevers, the PZT/SU-8 structures show excellent flexibility. This allows 1-mm long cantilever to actuate at bending angle over 90 ° without breaking.

Keywords

cantilevers; lead compounds; optical polymers; piezoelectric thin films; PZT; PZT/SU-8 structure; actuation experiments; batch fabrication process; bending angle; brittleness; cantilevers; flexibility; photosensitive polymer SU-8; piezoelectric characteristics; piezoelectric thin films; size 1 mm; stiffness; Actuators; Fabrication; Micromechanical devices; Polymers; Resonant frequency; Silicon; Substrates; Actuator; Flexibility; MEMS; PZT/SU-8 structure;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop (ISAF/ISIF/PFM), 2015 Joint IEEE International Symposium on the

Conference_Location

Singapore

Type

conf

DOI

10.1109/ISAF.2015.7172699

Filename

7172699