DocumentCode :
3366799
Title :
Segment-based approach for real-time reactive rescheduling for automatic manufacturing control
Author :
Toba, Hiroyasu
Author_Institution :
C&C Media Res. Labs., NEC Corp., Kawasaki, Japan
fYear :
1999
fDate :
1999
Firstpage :
69
Lastpage :
72
Abstract :
We propose a new segment-based approach for a real-time reactive rescheduling method, which is applicable to actual large-scale manufacturing systems, such as fully-automated semiconductor wafer fabrication lines. The proposed method can efficiently (in terms of computation time) schedule processing operations at equipment units by dividing a wide scheduling range into small segments, and by using a greedy scheduling algorithm. From the simulation results obtained, we experimentally confirmed that the proposed method manages to keep all schedules at 55 equipment units executable in terms of processing performance and schedule quality at all times
Keywords :
integrated circuit manufacture; process control; real-time systems; scheduling; automatic manufacturing control; computer simulation; greedy scheduling algorithm; real-time reactive rescheduling; segment-based method; semiconductor wafer fabrication; Accidents; Automatic control; Dispatching; Fabrication; Job shop scheduling; Laboratories; Manufacturing automation; National electric code; Semiconductor device manufacture; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location :
Santa Clara, CA
ISSN :
1523-553X
Print_ISBN :
0-7803-5403-6
Type :
conf
DOI :
10.1109/ISSM.1999.808740
Filename :
808740
Link To Document :
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