Phase difference determination by fringe pattern correlation

Author

Liu, Lanjiao ; Xu, Hongmei ; Song, Zhengxun ; Liu, Rencheng ; Zhang, Jin ; Wang, Zuobin

Author_Institution

Centre for Nano Metrol. & Manuf. Technol., Changchun Univ. of Sci. & Technol., Changchun, China

fYear

2009

fDate

9-12 Aug. 2009

Firstpage

4868

Lastpage

4873

Abstract

This paper presents a method of phase difference determination by fringe pattern correlation in interferometry. In the method, the phase difference between two fringe patterns is determined by fringe pattern correlation and linear interpolation with subpixel accuracy. The experiment shows that this method is useful for the determination of phase difference between two equi-spaced fringe patterns in interferometry, and it has the advantages of high precision of measurement and high resistance to noise.

Keywords

birefringence; correlation methods; interferometry; phase measurement; fringe pattern correlation; interferometry; linear interpolation; phase difference determination; subpixel accuracy; Electrical resistance measurement; Interpolation; Manufacturing automation; Mechatronics; Metrology; Noise measurement; Optical interferometry; Phase measurement; Phase noise; Pulp manufacturing; fringe pattern correlation; interferometry; nano displacement measurement; phase measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics and Automation, 2009. ICMA 2009. International Conference on

Conference_Location

Changchun

Print_ISBN

978-1-4244-2692-8

Electronic_ISBN

978-1-4244-2693-5

Type

conf

DOI

10.1109/ICMA.2009.5246382

Filename

5246382