Title :
Phase difference determination by fringe pattern correlation
Author :
Liu, Lanjiao ; Xu, Hongmei ; Song, Zhengxun ; Liu, Rencheng ; Zhang, Jin ; Wang, Zuobin
Author_Institution :
Centre for Nano Metrol. & Manuf. Technol., Changchun Univ. of Sci. & Technol., Changchun, China
Abstract :
This paper presents a method of phase difference determination by fringe pattern correlation in interferometry. In the method, the phase difference between two fringe patterns is determined by fringe pattern correlation and linear interpolation with subpixel accuracy. The experiment shows that this method is useful for the determination of phase difference between two equi-spaced fringe patterns in interferometry, and it has the advantages of high precision of measurement and high resistance to noise.
Keywords :
birefringence; correlation methods; interferometry; phase measurement; fringe pattern correlation; interferometry; linear interpolation; phase difference determination; subpixel accuracy; Electrical resistance measurement; Interpolation; Manufacturing automation; Mechatronics; Metrology; Noise measurement; Optical interferometry; Phase measurement; Phase noise; Pulp manufacturing; fringe pattern correlation; interferometry; nano displacement measurement; phase measurement;
Conference_Titel :
Mechatronics and Automation, 2009. ICMA 2009. International Conference on
Conference_Location :
Changchun
Print_ISBN :
978-1-4244-2692-8
Electronic_ISBN :
978-1-4244-2693-5
DOI :
10.1109/ICMA.2009.5246382
