Title :
Weighted configuration matrix approach to cluster tool metrics
Author :
Dolman, Denver ; Christian, Craig ; Wang, Qingsu ; Crowley, J.
Author_Institution :
Adv. Micro Devices Inc., Austin, TX, USA
Abstract :
A weighted configuration matrix method is introduced. With this method equipment users can easily configure a cluster tool and apply the existing industry metrics, such as E10 and OEE, to monitor the cluster tool performance. The detailed approach and advantages are discussed in this paper
Keywords :
cluster tools; integrated circuit manufacture; matrix algebra; process monitoring; AMD users; E10; OEE; cluster tool configuration; cluster tool metrics; data tracking; performance monitoring; semiconductor industry; weighted configuration matrix approach; Electronics industry; Large Hadron Collider; Lifting equipment; Monitoring; Throughput;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-5403-6
DOI :
10.1109/ISSM.1999.808766
