• DocumentCode
    3367325
  • Title

    Weighted configuration matrix approach to cluster tool metrics

  • Author

    Dolman, Denver ; Christian, Craig ; Wang, Qingsu ; Crowley, J.

  • Author_Institution
    Adv. Micro Devices Inc., Austin, TX, USA
  • fYear
    1999
  • fDate
    1999
  • Firstpage
    179
  • Lastpage
    182
  • Abstract
    A weighted configuration matrix method is introduced. With this method equipment users can easily configure a cluster tool and apply the existing industry metrics, such as E10 and OEE, to monitor the cluster tool performance. The detailed approach and advantages are discussed in this paper
  • Keywords
    cluster tools; integrated circuit manufacture; matrix algebra; process monitoring; AMD users; E10; OEE; cluster tool configuration; cluster tool metrics; data tracking; performance monitoring; semiconductor industry; weighted configuration matrix approach; Electronics industry; Large Hadron Collider; Lifting equipment; Monitoring; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
  • Conference_Location
    Santa Clara, CA
  • ISSN
    1523-553X
  • Print_ISBN
    0-7803-5403-6
  • Type

    conf

  • DOI
    10.1109/ISSM.1999.808766
  • Filename
    808766
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3367325