Title :
Improving process control for older-generation tools by implementing equipment-level SPC
Author_Institution :
Cypress Semicond., Round Rock, TX, USA
Abstract :
With a properly implemented system, equipment-level SPC of process input variables dramatically increases sensitivity to process variations than traditional output SPC. We demonstrate that such a system (1) is readily implemented on older-generation process tools, (2) can be implemented at little to no cost in some cases, (3) prevents scrap by identifying real process problems that industry-standard output SPC misses
Keywords :
control engineering computing; integrated circuit manufacture; ion implantation; production engineering computing; quality control; statistical process control; data analysis methodology; equipment-level SPC; ion implantation; older-generation process tools; process input variables; process variation sensitivity; quality metric; real process problem identification; scrap prevention; Algorithm design and analysis; Costs; Data analysis; Electrical equipment industry; Input variables; Metrology; Performance evaluation; Process control; Production systems; Software systems;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-5403-6
DOI :
10.1109/ISSM.1999.808774
