Title :
A low-cost, accurate and fast capacitive displacement sensor with microcontroller interfacing
Author :
Toth, Ferry N. ; Meijer, G.C.M.
Author_Institution :
Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands
Abstract :
A high-performance, capacitive displacement measuring system is described. Using a very linear oscillator, shielding and a three-signal approach, most of the errors are eliminated. The accuracy amounts to 1 μm over a 1-mm range. Since the output of the oscillator can be directly connected to a microcontroller, an analog-to-digital (A/D) converter is not needed. The system was tested in a fully automated setup, using an electrical XY table, the described sensor and a personal computer. Nonlinearity, long-term stability, and repeatability were verified
Keywords :
computerised instrumentation; displacement measurement; electric sensing devices; peripheral interfaces; capacitive displacement sensor; computerised instrumentation; linear oscillator; long-term stability; microcontroller; microcontroller interfacing; repeatability; shielding; three-signal approach; Analog-digital conversion; Automatic testing; Capacitive sensors; Displacement measurement; Microcomputers; Microcontrollers; Oscillators; Sensor phenomena and characterization; Sensor systems; System testing;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1992. IMTC '92., 9th IEEE
Conference_Location :
Metropolitan, NY
Print_ISBN :
0-7803-0640-6
DOI :
10.1109/IMTC.1992.245106
