Ultra-thin electro-optical films

The present work reviews related literature and investigates the deposition process and the effects of stress on the electrical and optical properties of ultra-thin electro-optical films (<; 50 nm). Two material properties have been identified as significant: The film thickness and the choice of film/substrate combinations. Two process states have been identified as influential: The deposition parameters and the thermal treatment. Notably, the nucleation behavior and surface energy (viz. “wetting properties”) of the deposited material onto the substrate surface greatly determine the surface morphology and crystallinity of these films, which in turn, affect the electrical and optical properties.